MEMS Links
Second hand equipment
MEMSCAP
- MUMPs pricelist PolyMUMPs, SOIMUMPS, MetalMUMPs
- University of Louisville Microfabrication Resources, lab procedure, materials, etc
National Nanofabrication Users Network (NNUN)
University of California, Berkeley -- Microfabrication Laboratory (Microlab)
- Microlab Lab Manual at Berkeley
- Microfabrication Laboratory (Microlab) -- Home page
- Microfabrication Laboratory (Microlab) -- Layout on 4th floor of Cory Hall
- Microlab Web Camera - LIVE! -- An example of lab view
- Integrated Materials Laboratory -- Home page
University of California at Los Angeles -- Nanoelectronics Research Facility (NRF)
- NRL -- Home page
- Interactive Nanolab layout
- Cleanroom size: 00 nsf of class 100 space; 8,000 nsf of class 1000 space. (source)
- ICSL(net) -- Integrated Circuits and Systems home page
University of California at Santa Barbara -- Nanotech, Nanofabrication Facility
- Nanotech-- Home page
- Nanotech -- Cleanrooms
- Nanotech
-- Cleanroom layouts.
Description of an expanded facility now under construction :"State funds are requested for preparation of working drawings and construction of the Engineering-Science Building. This project will construct a 52,000 asf building to meet the instruction and research needs and projected enrollment increases in the College of Engineering. The project will include a 10,000 asf nanofabrication facility to address the instruction and research needs of engineering and science departments in the expanding field of semi-conductors. The Engineering-Science Building includes two classrooms and specialized teaching laboratories to support the departments of Electrical and Computer Engineering and Mechanical and Environmental Engineering." ( source)
California Institute of Technology/Jet Propulsion Laboratory -- Center for Space Microelectronics Technology (CSMT)
Other Useful Nano-/Microfabrication Links
THIN FILM TECHNOLOGY Cleanroom Tips from Optimum Concepts:
Tip #1, What HEPA Filters Can and Can Not Do!
Tip #2 ,The Process Equipment is Part of the Cleanroom Too!
Microfabrication Facilities At Other Universities from the University of Louisville A definition of Cleanroom Class from the University of Louisville
The Laboratories Subway -- Clickable map National Nanofabrication Users Network (NNUN) -- Home page Home page and academic list of Gina Miller's Nanotechnologies Industries. Nan Ox's list of Semiconductor Laboratories Mitre's Gateway to the Nanocosm -- provides the Internet Gateway to nanoelectronics research and development information and resources from around the world. National Nanofabrication Facility, Australia LLNL Microtechnology Center University of Idaho Links to VLSI WWW Servers Semiconductor Companies list from UIUC Microcalorimetry Nanometer Pattern Generation System The Nanotechnology Database from Loyola College in Maryland WTEC Panel Report on Nanostructure Science and Technology Energy Management in Semiconductor Cleanrooms HEPA/ULPA Filters
What are HEPA Filters?
About HEPA Filters
Typical HEPA filter construction (source)
